Takahiro Matsuda

Title: Takahiro Matsuda: Innovator in Polishing Technology

Introduction

Takahiro Matsuda is a notable inventor based in Annaka, Japan. He has made significant contributions to the field of polishing technology, particularly in the semiconductor industry. With a total of 2 patents, his work focuses on methods and apparatuses that enhance the efficiency and effectiveness of polishing processes.

Latest Patents

Matsuda's latest patents include a method of producing a polishing head and a polishing apparatus specifically designed for semiconductor wafers. The first patent describes a method that involves creating a polishing head with a backing pad and a ring template. This innovative design allows for the workpiece's back surface to be held securely while the front surface is polished against a rotating polishing pad. The method emphasizes sticking the backing pad and template using double-sided tape under reduced pressure without heating, resulting in a very flat workpiece.

The second patent presents a polishing head that comprises a carrier, a guide ring, a dress ring, and a head body. This head body is rotatable and designed to hold the other components securely. The unique reversed-bowl shape of the head body, along with a pressure regulating mechanism, allows for precise control during the polishing process. This innovation effectively prevents excessive polishing on the outer periphery of semiconductor wafers, minimizing the risk of impressions or scratches.

Career Highlights

Throughout his career, Matsuda has worked with prominent companies such as Shin-Etsu Handotai Co., Ltd. and Shin-Etsu Engineering Co., Ltd. His experience in these organizations has contributed to his expertise in polishing technologies and has enabled him to develop groundbreaking inventions.

Collaborations

Matsuda has collaborated with notable colleagues, including Hiromasa Hashimoto and Yasuharu Ariga. These partnerships have likely fostered an environment of innovation and creativity, leading to advancements in their respective fields.

Conclusion

Takahiro Matsuda's contributions to polishing technology have made a significant impact on the semiconductor industry. His innovative patents and career achievements highlight his dedication to improving manufacturing processes. His work continues to influence the field, paving the way for future advancements in polishing technology.