Tai-Hsiang Lin

Title: Innovations by Tai-Hsiang Lin

Introduction

Tai-Hsiang Lin is a notable inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding three patents that showcase his innovative spirit and technical expertise.

Latest Patents

One of his latest patents is an air processing system for semiconductor containers. This invention includes a container body with multiple walls that define an interior space for receiving wafers. The air processing system is attached to the container body and consists of several modules, including an exchange module, an air extraction module, a first contaminant removal module, a processing module, a second contaminant removal module, a controller module, and a power module. The exchange module is coupled to one of the walls of the container body, while the air extraction module extracts air from the container. The first contaminant removal module is connected to both the air extraction and exchange modules. The processing module is linked to the air extraction module, and the second contaminant removal module connects to both the processing and exchange modules. The controller module is designed to turn the air extraction module on and off as needed.

Another significant patent by Lin is a fault detection method in a semiconductor fabrication facility. This method involves processing a semiconductor wafer in a fabrication tool according to various process events. It includes measuring humidity in the fabrication tool during at least one of these events. The method compares the measured humidity with an expected value associated with the process event. If the difference exceeds acceptable limits, an alarm condition is indicated.

Career Highlights

Tai-Hsiang Lin works at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that enhance the efficiency and reliability of semiconductor manufacturing processes.

Collaborations

Lin collaborates with talented individuals such as You-Cheng Yeh and Mao-Chih Huang, contributing to a dynamic and innovative work environment.

Conclusion

Tai-Hsiang Lin's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Ltd. highlight his role as a key innovator in the field. His inventions not only improve manufacturing processes but also pave the way for future advancements in semiconductor technology.