Location History:
- Kyungki-do, KR (1996 - 2001)
- Suwon, KR (2000 - 2002)
Company Filing History:
Years Active: 1996-2002
Title: Innovations of Tae-ryong Kim
Introduction
Tae-ryong Kim is a prominent inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work focuses on improving processes and apparatuses used in semiconductor device fabrication.
Latest Patents
One of his latest patents is a thermoelectric-cooling temperature control apparatus for semiconductor device fabrication facilities. This innovative apparatus maintains stable temperature conditions, such as the temperature of a wafer, during the fabrication process. It includes a heat exchanger with a thermoelectric cooling element that utilizes the Peltier Effect to absorb and radiate heat based on the current flowing through the element.
Another notable patent is a method for removing photoresist masks used for etching metal layers and other etching by-products. This method effectively removes polymers produced as by-products during the etching process. It involves processing the polymers prior to removal to facilitate their elimination. The semiconductor substrate is conveyed from the etching chamber to an ashing chamber without a vacuum break. In the ashing chamber, the substrate is pretreated with nitrogen gas under vacuum conditions, which modifies the polymer by-products for easier removal during ashing.
Career Highlights
Tae-ryong Kim is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in semiconductor technology. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor fabrication processes.
Collaborations
He collaborates with talented coworkers, including Young-woo Lee and Tae-Hoon Kim, contributing to a dynamic team focused on advancing semiconductor technologies.
Conclusion
Tae-ryong Kim's contributions to semiconductor technology through his innovative patents demonstrate his expertise and commitment to the field. His work continues to influence the industry positively, paving the way for future advancements.