The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2001
Filed:
Jun. 16, 1999
Applicant:
Inventors:
Kwang-Jin Jung, Suwon, KR;
Tae-ryong Kim, Suwon, KR;
Chung-howan Kim, Yongin, KR;
Jae-hee Hwang, Yongin, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1302 ; H01L 2/1461 ; H01L 2/1311 ; H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/1302 ; H01L 2/1461 ; H01L 2/1311 ; H01L 2/144 ;
Abstract
A method of manufacturing semiconductor device that improves the alignment margin between a contact hole and a device pattern includes a layer having an upper vertically shaped portion and a lower symmetrically inclined shaped portion. That is, the lower portion is tapered.