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For the Inventor, By the Inventor

Tokyo, Japan

Tadashi Nagayama

USPTO Granted Patents = 15 

 

Average Co-Inventor Count = 2.3

ph-index = 6

Forward Citations = 147(Granted Patents)


Location History:

  • Ota-ku, JP (1996 - 1997)
  • Tokyo, JP (1998 - 2018)
  • Toshima-ku, JP (2012 - 2019)

Company Filing History:

goldMedal15 out of 8,902 
 
Nikon Corporation
 patents

Years Active: 1996-2019

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15 patents (USPTO):Explore Patents
1. 10209623 - Exposure apparatus, exposure method, and method for producing device (2019-02-19),
2. 9927713 - Surface position detection apparatus, exposure apparatus, and exposure method (2018-03-27),
3. 9519223 - Surface position detection apparatus, exposure apparatus, and exposure method (2016-12-13),
4. 9383656 - Exposure apparatus, exposure method, and method for producing device (2016-07-05),
5. 9069261 - Surface position detection apparatus, exposure apparatus, and exposure method (2015-06-30),
6. 9063438 - Exposure apparatus, exposure method, and method for producing device (2015-06-23),
7. 8384875 - Exposure apparatus, exposure method, and method for producing device (2013-02-26),
8. 8149382 - Surface position detection apparatus, exposure apparatus, and exposure method (2012-04-03),
9. 8130361 - Exposure apparatus, exposure method, and method for producing device (2012-03-06),
10. 5872618 - Projection exposure apparatus (1999-02-16),
11. 5798838 - Projection exposure apparatus having function of detecting intensity (1998-08-25),
12. 5797674 - Illumination optical system, alignment apparatus, and projection (1998-08-25),
13. 5754299 - Inspection apparatus and method for optical system, exposure apparatus (1998-05-19),
14. 5680200 - Inspection apparatus and method for optical system, exposure apparatus (1997-10-21),
15. 5552892 - Illumination optical system, alignment apparatus, and projection (1996-09-03),
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