For the Inventor, By the Inventor

Enter inventor name

Tadashi Nagayama

USPTO Granted Patents = 15 (Patent Applications = 1)

EPO Patents = 10 (Patent Applications = 12)

Average Co-Inventor Count = 2.3

ph-index = 6

Forward Citations = 147(Granted Patents)

Location History:

Ota-ku, JP (1996 - 1997)
Tokyo, JP (1998 - 2018)
Toshima-ku, JP (2012 - 2019)

Company Filing History:

15 out of 8,889

Nikon Corporation

Years Active: 1996-2019

Loading Chart...

Loading Chart...

15 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10209623 - Exposure apparatus, exposure method, and method for producing device (2019-02-19),

2. 9927713 - Surface position detection apparatus, exposure apparatus, and exposure method (2018-03-27),

3. 9519223 - Surface position detection apparatus, exposure apparatus, and exposure method (2016-12-13),

4. 9383656 - Exposure apparatus, exposure method, and method for producing device (2016-07-05),

5. 9069261 - Surface position detection apparatus, exposure apparatus, and exposure method (2015-06-30),

6. 9063438 - Exposure apparatus, exposure method, and method for producing device (2015-06-23),

7. 8384875 - Exposure apparatus, exposure method, and method for producing device (2013-02-26),

8. 8149382 - Surface position detection apparatus, exposure apparatus, and exposure method (2012-04-03),

9. 8130361 - Exposure apparatus, exposure method, and method for producing device (2012-03-06),

10. 5872618 - Projection exposure apparatus (1999-02-16),

11. 5798838 - Projection exposure apparatus having function of detecting intensity (1998-08-25),

12. 5797674 - Illumination optical system, alignment apparatus, and projection (1998-08-25),

13. 5754299 - Inspection apparatus and method for optical system, exposure apparatus (1998-05-19),

14. 5680200 - Inspection apparatus and method for optical system, exposure apparatus (1997-10-21),

15. 5552892 - Illumination optical system, alignment apparatus, and projection (1996-09-03),

This text is generated by artificial intelligence and may not be accurate.

Please report any incorrect information to support@idiyas.com

Loading…