The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 1999
Filed:
Feb. 27, 1997
Tadashi Nagayama, Tokyo, JP;
Yuuki Ishii, Yokohama, JP;
Masahiro Nei, Kawasaki, JP;
Tohru Kiuchi, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A is a projection exposure apparatus has a light sending optical system exhibiting a high degree of freedom of light sending. The light sending optical system comprises a light introducing system for introducing light beams from a predetermined light source into a substrate stage, and a light irradiating system for irradiating a predetermined area with the light beams introduced into the substrate stage by the light introducing system. The light introducing system and the light irradiating system are mechanically separated but optically connectable only when the substrate stage is in a specified positional relationship with respect to the projection optical system.