This inventor holds 8 USPTO granted patents and 11 published patent applications and 1 EPO patent. Top assignees: Dainippon Screen Mfg. Co., Ltd., Screen Holdings Co., Ltd., Screen Holdings Co., Ltd.. Active years: 1997-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Shiga-ken, JP (1997)
- Kyoto, JP (2008 - 2022)
Company Filing History:
3 out of 1,306 
3 out of 1,123 
2 out of 144 Years Active: 1997-2026
Title: The Innovations of Tadashi Maegawa
Introduction
Tadashi Maegawa is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 8 patents. His work has been instrumental in advancing technologies related to substrate processing apparatuses.
Latest Patents
One of his latest patents is a substrate processing apparatus that includes a substrate holder, a rotating mechanism, a processing liquid discharge unit, and a gas discharge unit. The processing liquid discharge unit is designed to discharge a liquid flow of a processing liquid, ensuring that the liquid flow comes into contact with a landing position in the rotation path of the peripheral portion of the upper surface of the substrate being rotated. Additionally, the gas discharge unit plays a crucial role by discharging a first gas flow of an inert gas from above toward a first position upstream from the landing position in the direction of rotation of the substrate. It also discharges a second gas flow of the inert gas from above toward a second position upstream from the first position in the same direction. Notably, the kinetic energy of the second gas flow is lower than that of the first gas flow, enhancing the efficiency of the substrate processing.
Career Highlights
Throughout his career, Tadashi Maegawa has worked with notable companies such as Dainippon Screen Manufacturing Co., Ltd. and Screen Holdings Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to innovative projects in the field of substrate processing.
Collaborations
Tadashi has collaborated with several talented individuals, including Rei Takeaki and Koji Ando. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Tadashi Maegawa's contributions to substrate processing technology are noteworthy and reflect his dedication to innovation. His patents and collaborations continue to influence the industry, showcasing the importance of his work in advancing technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile