The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2026
Filed:
Aug. 22, 2023
Screen Holdings Co., Ltd., Kyoto, JP;
Tadashi Maegawa, Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
A substrate treating apparatus includes a substrate holder that holds a treatment substrate group, a second transport mechanism configured to pull out and transport a divided substrate group from the treatment substrate group held by the substrate holder, and an underwater posture turning unit to turn the orientation of the divided substrate group from vertical to horizontal. A center robot takes and transports one substrate from the divided substrate group to the one substrate to a single-wafer processing unit. A lifting and lowering unit moves the substrate holder and the second transport mechanism upward/downward relatively. An alignment direction relative moving unit moves the substrate holder and the second transport mechanism horizontally in an alignment direction where the treatment substrate group is aligned. The second transport mechanism includes paired chucks having holding grooves and passing grooves arranged alternately.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile