The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2008
Filed:
May. 04, 2005
Applicants:
Toshio Hiroe, Kyoto, JP;
Tadashi Maegawa, Kyoto, JP;
Yoshitaka Abiko, Kyoto, JP;
Akira Morita, Kyoto, JP;
Inventors:
Toshio Hiroe, Kyoto, JP;
Tadashi Maegawa, Kyoto, JP;
Yoshitaka Abiko, Kyoto, JP;
Akira Morita, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J 19/12 (2006.01); B08B 3/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate treating apparatus for treating substrates having a film coating. The apparatus includes a treating unit for treating the substrates with a treating solution, a drain pipe for draining the treating solution from the treating unit, a filter mounted on the drain pipe, and an ultraviolet emitting unit for the filter for emitting ultraviolet light to the treating solution flowing through the filter.