Company Filing History:
Years Active: 1998-2000
Title: Innovations by Susan C Abraham
Introduction
Susan C Abraham is a prominent inventor based in San Jose, California. She has made significant contributions to the field of semiconductor processing, holding a total of seven patents. Her work focuses on improving etching techniques and microloading processes in plasma processing chambers.
Latest Patents
One of her latest patents is titled "Methods and apparatus for improving microloading while etching a substrate." This invention outlines a method for enhancing microloading of a substrate during the etching process in a plasma processing chamber. The method involves obtaining data sets that correlate power ratios of different power supplies with microloading percentages for various trench widths. Another notable patent is "Methods and apparatus for etching semiconductor wafers," which describes a technique for etching a TiN layer of a wafer stack using a specific chemistry that includes a TiN etchant, a noble gas, and a polymer-forming chemical.
Career Highlights
Susan has built a successful career at Lam Research Corporation, where she has been instrumental in advancing semiconductor manufacturing technologies. Her innovative approaches have led to improved efficiency and effectiveness in etching processes.
Collaborations
Throughout her career, Susan has collaborated with notable colleagues, including Gregory James Goldspring and Peter H Chen. These partnerships have contributed to her success and the development of her patented technologies.
Conclusion
Susan C Abraham is a trailblazer in the semiconductor industry, with her patents reflecting her commitment to innovation and excellence. Her work continues to influence the field and drive advancements in technology.