Location History:
- Seoul, KR (2016 - 2022)
- Hwaseong-si, KR (2020 - 2024)
Company Filing History:
Years Active: 2016-2025
Title: The Innovative Contributions of Sungho Jang
Introduction
Sungho Jang is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 18 patents. His work focuses on advancing measurement apparatuses and diagnostic tools for plasma processes.
Latest Patents
One of his latest patents is a semiconductor measurement apparatus. This apparatus includes an illumination unit with a light source and at least one illumination polarization element. It also features a light receiving unit with at least one light-receiving polarization element positioned on the path of light reflected by a sample. An image sensor is included to receive light passing through the light-receiving polarization element and output an original image. The control unit processes this original image to determine a selected critical dimension among the critical dimensions of a structure within the sample. The control unit can obtain multiple sample images by selecting regions of the original image where interference peaks appear, allowing for the determination of elements in a Mueller matrix and the selected critical dimension.
Another notable patent is for an apparatus for arcing diagnosis, which includes plasma process equipment. This apparatus consists of first and second VI sensors, an optical sensor, and an arcing detector. The first VI sensor is located in a power filter or on a power supply line connected to a heater in a lower electrode of a process chamber. It senses harmonics generated from a power supply and outputs a signal. The optical sensor measures light intensity from the process chamber, while the second VI sensor is connected to an upper electrode. The arcing detector uses these signals to determine if arcing occurs.
Career Highlights
Sungho Jang is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and develop advanced technologies. His work has significantly impacted the semiconductor industry, particularly in improving measurement and diagnostic techniques.
Collaborations
He has collaborated with notable colleagues, including Yoosang Hwang and Jinseob Kim, contributing to various projects and advancements in their field.
Conclusion
Sungho Jang's innovative patents and contributions to semiconductor technology highlight his expertise and dedication to advancing the industry. His work continues to influence the development of new technologies and methodologies in semiconductor measurement and diagnostics.
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