Yongin-si, South Korea

Sung-Joo An


Average Co-Inventor Count = 7.5

ph-index = 1

Forward Citations = 2(Granted Patents)


Location History:

  • Yongin-si, KR (2022)
  • Seongnam-si, KR (2022)

Company Filing History:


Years Active: 2022

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2 patents (USPTO):

Title: Innovations by Sung-Joo An in Semiconductor Manufacturing

Introduction

Sung-Joo An is a notable inventor based in Yongin-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor production processes.

Latest Patents

Sung-Joo An's latest patents include a semiconductor manufacturing apparatus that features an insulating plate. This apparatus is designed to divide the interior space of a process chamber into two distinct areas, thermally isolating them to improve performance. The gas supplier within the apparatus is responsible for delivering process gas to the first space, while a radiator heats this area. Additionally, a stage is positioned in the second space to support the substrate during manufacturing.

Another significant patent involves a plasma deposition method and apparatus for manufacturing semiconductor devices. In this method, a substrate is placed onto a stage within a chamber, where a first plasma is generated at a specific distance from the substrate. This is followed by a pre-treatment process using a first process gas. Subsequently, a second plasma is generated at a different distance, allowing for a deposition process with a second process gas.

Career Highlights

Sung-Joo An is currently employed at Samsung Electronics Co., Ltd., a leading company in the technology sector. His work at Samsung has allowed him to contribute to cutting-edge advancements in semiconductor technology.

Collaborations

Throughout his career, Sung-Joo An has collaborated with esteemed colleagues, including Kaoru Yamamoto and Kee-Young Jun. These partnerships have fostered innovation and development in their respective fields.

Conclusion

Sung-Joo An's contributions to semiconductor manufacturing through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to influence the industry and pave the way for future developments.

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