This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Lam Research Corporation. Active years: 2017-2023.
Location History:
- San Ramon, CA (US) (2017)
- Pleasanton, CA (US) (2023)
Company Filing History:
Years Active: 2017-2023
Title: Innovations of Sung Jin Jung
Introduction
Sung Jin Jung is a notable inventor based in San Ramon, CA (US). He has made significant contributions to the field of etching applications, holding a total of 2 patents. His work focuses on advanced methods that enhance the efficiency and precision of semiconductor manufacturing processes.
Latest Patents
One of his latest patents is titled "Directional deposition in etch chamber." This patent describes methods for forming a vertical growth mask for use in etching applications. The disclosed embodiments include introducing a tungsten-containing deposition precursor and one or more carrier gases while igniting a plasma. This process allows for selective deposition of tungsten on field regions of positive features of a patterned etch mask, minimizing deposition on sidewalls and exposed surfaces of the target layer.
Another significant patent is "Hybrid stair-step etch." This method outlines a process for forming a stair-step structure in a substrate that utilizes an organic mask. The process involves multiple cycles of depositing a hardmask, trimming the organic mask, and etching the substrate, ultimately creating a precise stair-step structure.
Career Highlights
Sung Jin Jung is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His innovative approaches have contributed to the advancement of etching technologies, making him a valuable asset to his organization.
Collaborations
He has collaborated with notable coworkers, including Yoko Yamaguchi and Wonchul Lee, who share a commitment to pushing the boundaries of semiconductor technology.
Conclusion
Sung Jin Jung's contributions to the field of etching applications through his patents demonstrate his expertise and innovative spirit. His work continues to influence the semiconductor industry, paving the way for future advancements.