Sung Il Chung

Title: Innovations of Sung Il Chung

Introduction

Sung Il Chung is a notable inventor based in Pohang-si, South Korea. He has made significant contributions to the field of technology, particularly in the area of plasma processing and lithography. With a total of 4 patents, his work has advanced the capabilities of various manufacturing processes.

Latest Patents

One of his latest patents is the "Plasma immersion ion milling apparatus and method." This invention discloses an apparatus and method for low-temperature plasma immersion processing of various workpieces using accelerated ions. The method involves distributing low-temperature plasma around a cylindrical workpiece placed in a chamber. The workpiece is enclosed with a housing that includes a multi-slot extracting electrode to isolate it from the plasma. A negative potential is applied to induce sputtering, allowing ions from the plasma to be accelerated and bombard the workpiece, effectively polishing its surface. This method is particularly effective for surface smoothing of large cylindrical substrates, especially those used for micro or nanopattern transfer.

Another significant patent is the "Cylindrical magnetic levitation stage and lithography." This invention provides a cylindrical magnetic levitation stage and an exposure apparatus capable of forming nanoscale patterns on the surface of a large cylinder. The exposure apparatus includes a new type of cylindrical magnetic levitation stage that can levitate, rotate, and move a cylinder in a non-contact manner. This innovation reduces position errors to a nanoscale size and corrects mechanical processing errors in real time. Additionally, the apparatus employs a differential vacuum means to create a partial vacuum environment, allowing the use of advanced light sources such as X-rays and extreme ultraviolet rays.

Career Highlights

Sung Il Chung has worked with prominent organizations, including the Korea Electrotechnology Research Institute and New Optics, Ltd. His experience in these institutions has contributed to his expertise in the field of plasma technology and lithography.

Collaborations

He has collaborated with notable coworkers such as Jeong Woo Jeon and Hyeon Seok Oh, further enhancing his innovative projects and research.

Conclusion

Sung Il Chung's contributions to technology through his patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in plasma processing and lithography, showcasing the importance of innovation in modern manufacturing.