The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Oct. 28, 2010
Jeong Woo Jeon, Gyeongsangnam-do, KR;
Hyeon Seok OH, Gyeonggi-do, KR;
Mitica Caraiani, Gyeongsangnam-do, KR;
Sung IL Chung, Gyeongsangnam-do, KR;
Hyeon Taeg Kim, Gyeongsangnam-do, KR;
Chang Rin Lee, Gyeongsangnam-do, KR;
Jong Moon Kim, Daegu, KR;
Jeong Woo Jeon, Gyeongsangnam-do, KR;
Hyeon Seok Oh, Gyeonggi-do, KR;
Mitica Caraiani, Gyeongsangnam-do, KR;
Sung Il Chung, Gyeongsangnam-do, KR;
Hyeon Taeg Kim, Gyeongsangnam-do, KR;
Chang Rin Lee, Gyeongsangnam-do, KR;
Jong Moon Kim, Daegu, KR;
Korea Electrotechnology Research Institute, Gyeongsangnam-do, KR;
Abstract
The present invention provides a cylindrical magnetic levitation stage and an exposure apparatus, which can form a nanoscale pattern of a large area directly on the surface of a large cylinder. The present invention provides an exposure apparatus including a new type of cylindrical magnetic levitation stage, which can levitate, rotate, and move a cylinder in the axial direction by the principle of magnetic levitation in a non-contact manner and form a nanoscale pattern on the surface of the cylinder, and a light source for irradiating light on the surface of the cylinder, thereby reducing the position error of the cylindrical magnetic levitation stage to a nanoscale size and correcting the error caused by mechanical processing in real time. Moreover, the present invention provides an exposure apparatus, which includes a differential vacuum means combined with the cylindrical magnetic levitation stage to create a partial vacuum environment between the light source and the surface of the cylinder, and thus it is possible to employ light sources such as X-rays, electron beams, extreme ultraviolet (EUV) rays, etc.