Hyeon Seok Oh

Title: Hyeon Seok Oh: Innovator in Plasma Processing and Lithography

Introduction

Hyeon Seok Oh is a prominent inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the fields of plasma processing and lithography, holding a total of 3 patents. His innovative work focuses on enhancing the precision and efficiency of manufacturing processes.

Latest Patents

Hyeon Seok Oh's latest patents include a Plasma Immersion Ion Milling Apparatus and Method. This invention discloses an apparatus and method for low-temperature plasma immersion processing of various workpieces using accelerated ions. The apparatus features a cylindrical workpiece placed in a chamber, where low-temperature plasma is distributed around it. The workpiece is enclosed with a housing that includes a multi-slot extracting electrode, isolating it from the plasma. A negative potential is applied to induce sputtering, allowing ions from the plasma to be accelerated and bombard the workpiece, effectively polishing its surface. This method is particularly effective for surface smoothing of large cylindrical substrates used in micro or nanopattern transfer.

Another notable patent is the Cylindrical Magnetic Levitation Stage and Lithography. This invention provides a cylindrical magnetic levitation stage and an exposure apparatus capable of forming nanoscale patterns on the surface of large cylinders. The exposure apparatus includes a new type of cylindrical magnetic levitation stage that can levitate, rotate, and move a cylinder in a non-contact manner. It also features a light source for irradiating light on the cylinder's surface, reducing position errors to nanoscale sizes and correcting mechanical processing errors in real time. Additionally, the apparatus incorporates a differential vacuum means to create a partial vacuum environment, allowing the use of advanced light sources such as X-rays and extreme ultraviolet rays.

Career Highlights

Hyeon Seok Oh has worked with notable organizations, including the Korea Electrotechnology Research Institute and New Optics, Ltd. His experience in these institutions has contributed to his expertise in the field of plasma processing and lithography.

Collaborations

Throughout his career, Hyeon Seok Oh has collaborated with esteemed colleagues, including Sung Il Chung and Jeong Woo Jeon. These collaborations have further enriched his research and development efforts.

Conclusion

Hyeon Seok Oh is a distinguished inventor whose work in plasma processing and lithography has paved the way for