Sun Joo Park

Title: Innovations of Sun Joo Park

Introduction

Sun Joo Park is a notable inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and functionality of semiconductor wafers and treatment processes.

Latest Patents

One of his latest patents is for a semiconductor wafer that includes a chip guard. This innovative wafer design features at least one chip region within a substrate, a first chip guard positioned over the substrate in a chip sealing region, and a second chip guard located in a scribe lane region. Additionally, it incorporates a test circuit pattern that includes a ground line connected to a ground well in the substrate. The second chip guard is designed with a ground wiring layer that connects to the ground line of the test circuit pattern.

Another significant patent by Park is an apparatus and method for treating substrates. This apparatus consists of a process chamber with a treatment space, a support unit for the substrate, and a gas supply unit that introduces process gas into the treatment space. It also includes an RF power supply that generates an RF signal to excite the process gas into plasma. The matching circuit within the apparatus performs impedance matching and removes harmonics caused by the RF power supply, operating in two modes based on the detection of harmonics.

Career Highlights

Sun Joo Park has worked with prominent companies in the semiconductor industry, including SK Hynix Inc. and Semes Co., Ltd. His experience in these organizations has allowed him to develop and refine his innovative ideas in semiconductor technology.

Collaborations

Throughout his career, Park has collaborated with talented individuals such as Sang Gon Lee and Daehyun Kim. These partnerships have contributed to the advancement of his projects and patents.

Conclusion

Sun Joo Park's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative designs and methods continue to impact the industry positively.