Sumio Yamaguchi

Title: Sumio Yamaguchi: Innovator in Semiconductor Technology

Introduction

Sumio Yamaguchi is a prominent inventor based in Hyogo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on improving the efficiency and integration of semiconductor devices.

Latest Patents

Yamaguchi's latest patents include a semiconductor device with low resistance wiring. This invention features an impurity region formed on the surface of a semiconductor substrate, with an insulating layer covering it. A trench is defined on the insulating layer's surface, and a connection hole allows for the connection between the trench and the impurity region. A conductive layer made of high melting point metal is embedded in the connection hole, with a copper wire formed in the trench. This innovation enhances the wiring circuit and provides a highly integrated semiconductor circuit.

Another notable patent is a semiconductor device comprising a composite barrier layer. This device includes conductors connected through a contact hole interlayer insulation layer, featuring a trilayer barrier layer. The trilayer consists of a titanium silicide layer, a titanium silicide layer formed by collimation sputtering, and a thermally nitrided titanium layer. This design increases the capacity of the collimation sputtering apparatus, prevents particle occurrence, and ensures low resistance electrical connections between conductors.

Career Highlights

Throughout his career, Yamaguchi has worked with notable companies such as Mitsubishi Electric Corporation and Renesas Technology Corporation. His experience in these organizations has contributed to his expertise in semiconductor technology.

Collaborations

Yamaguchi has collaborated with esteemed colleagues, including Atsushi Ishii and Kazuyoshi Maekawa. Their joint efforts have further advanced the field of semiconductor innovations.

Conclusion

Sumio Yamaguchi's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in semiconductor devices and their applications.