Company Filing History:
Years Active: 2007-2017
Title: Innovations of Steven H Kim
Introduction
Steven H Kim is a notable inventor based in Union City, CA (US). He has made significant contributions to the field of technology, particularly in the area of substrate processing. With a total of seven patents to his name, Kim has demonstrated a commitment to advancing innovative solutions in his industry.
Latest Patents
Among his latest patents is an integrated apparatus for efficient removal of halogen residues from etched substrates. This invention provides a method and apparatus for removing volatile residues from a substrate. In one embodiment, the method includes providing a processing system with a load lock chamber and at least one processing chamber coupled to a transfer chamber. The process involves treating a substrate in the processing chamber with a chemistry comprising halogen and subsequently removing volatile residues from the treated substrate in the load lock chamber.
Another significant patent is the in-situ chamber treatment and deposition process. This invention outlines a method for treating the inner surfaces of a processing chamber and depositing a material during a vapor deposition process, such as atomic layer deposition (ALD) or chemical vapor deposition (CVD). In one embodiment, the inner surfaces of the processing chamber and the substrate are exposed to a reagent, such as a hydrogenated ligand compound during a pretreatment process. This compound may be the same ligand as a free ligand formed from the metal-organic precursor used during the subsequent deposition process.
Career Highlights
Steven H Kim is currently employed at Applied Materials, Inc., where he continues to innovate and develop new technologies. His work has had a significant impact on the efficiency and effectiveness of substrate processing techniques.
Collaborations
Throughout his career, Kim has collaborated with notable colleagues, including Dien-Yeh Wu and Paul F Ma. These collaborations have contributed to the advancement of technology in their respective fields.
Conclusion
Steven H Kim's contributions to the field of technology through his patents and innovations highlight his expertise and dedication. His work continues to influence the industry and pave the way for future advancements.