Company Filing History:
Years Active: 2007-2017
Title: Innovations of Steven H Kim
Introduction
Steven H Kim is a notable inventor based in Union City, CA (US). He has made significant contributions to the field of technology, particularly in the area of substrate processing. With a total of seven patents to his name, Kim has demonstrated a commitment to advancing innovative solutions in his industry.
Latest Patents
Among his latest patents is an integrated apparatus for efficient removal of halogen residues from etched substrates. This invention provides a method and apparatus for removing volatile residues from a substrate. In one embodiment, the method includes providing a processing system with a load lock chamber and at least one processing chamber coupled to a transfer chamber. The process involves treating a substrate in the processing chamber with a chemistry comprising halogen and subsequently removing volatile residues from the treated substrate in the load lock chamber.
Another significant patent is the in-situ chamber treatment and deposition process. This invention outlines a method for treating the inner surfaces of a processing chamber and depositing a material during a vapor deposition process, such as atomic layer deposition (ALD) or chemical vapor deposition (CVD). In one embodiment, the inner surfaces of the processing chamber and the substrate are exposed to a reagent, such as a hydrogenated ligand compound during a pretreatment process. This compound may be the same ligand as a free ligand formed from the metal-organic precursor used during the subsequent deposition process.
Career Highlights
Steven H Kim is currently employed at Applied Materials, Inc., where he continues to innovate and develop new technologies. His work has had a significant impact on the efficiency and effectiveness of substrate processing techniques.
Collaborations
Throughout his career, Kim has collaborated with notable colleagues, including Dien-Yeh Wu and Paul F Ma. These collaborations have contributed to the advancement of technology in their respective fields.
Conclusion
Steven H Kim's contributions to the field of technology through his patents and innovations highlight his expertise and dedication. His work continues to influence the industry and pave the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.