Steven C Selbrede

Title: **Inventor Spotlight: Steven C. Selbrede**

Introduction

Steven C. Selbrede, an inventor based in San Jose, CA, has made significant contributions to the field of semiconductor processing with a total of six patents to his name. His innovative work focuses on advanced plasma systems, showcasing his expertise in enhancing technology used in the semiconductor industry.

Latest Patents

Among Steven's notable innovations are systems and methods for remote plasma cleaning. This innovative system features a high conductance delivery line designed to effectively convey activated species from a remote plasma generator to a processing chamber. With the capability of maintaining power levels below approximately 3 kW, his work in this area also includes designs that allow for the introduction of activated species through strategically placed inlet ports and specialized coaxial inject/exhaust assemblies. This ensures efficient cleaning of components beneath the susceptor, along with advanced endpoint detection methods.

Additionally, his patent for an inductive plasma reactor describes a detailed process for treating semiconductor wafers. Utilizing an induction coil that surrounds the reactor chamber, Steven applies RF power to form plasma effectively. A unique split Faraday shield is incorporated to limit the capacitive coupling of energy, optimizing plasma potential and ensuring precise processing of wafers through intricate control mechanisms.

Career Highlights

Steven has built a strong career largely rooted in two prominent companies: Mattson Technology, Inc. and Genus, Inc. His experience at these firms has enabled him to refine his skills and contribute to groundbreaking technologies that propel the semiconductor industry forward.

Collaborations

Throughout his career, Steven has collaborated with notable peers such as Stephen E. Savas and Brad S. Mattson. These partnerships have likely enhanced his innovative approaches and provided valuable insights that contribute to his successful inventions.

Conclusion

Steven C. Selbrede stands out as a prominent inventor in the semiconductor field, with a solid patent portfolio reflecting his commitment to elevating technological processing methods. His innovations are not only significant for their technical advancements but also demonstrate his dedication to solving challenges within semiconductor manufacturing. As the industry continues to evolve, Steven's contributions will likely play a critical role in shaping its future.