This inventor holds 6 USPTO granted patents and 1 EPO patent. Top assignees: International Business Machines Corporation, Infineon Technologies North America Corp., Siemens Aktiengesellschaft. Active years: 1999-2008.
Company Filing History:
5 out of 166,264 
1 out of 244 
1 out of 30,859 
Years Active: 1999-2008
Title: The Innovations of Stephen K Loh
Introduction
Stephen K Loh is a notable inventor based in Fishkill, NY (US). He has made significant contributions to the field of semiconductor manufacturing, holding a total of 6 patents. His work focuses on improving processes and structures within the semiconductor industry.
Latest Patents
One of his latest patents is titled "Detection of residual liner materials after polishing in damascene process." This invention involves a method and structure for detecting residual liner materials after polishing in damascene processes. It includes an integrated circuit comprising a substrate, a dielectric layer over the substrate, a marker layer over the dielectric layer, a liner over the marker layer and dielectric layer, and a metal layer over the liner. The marker layer comprises ultraviolet detectable material, which, upon excitation by an ultraviolet ray, signals an absence of the metal layer and the liner over the marker layer. Additionally, the marker layer is a separate layer from the dielectric layer, and the ultraviolet detectable material can include fluorescent or phosphorescent material.
Another significant patent is the "System and method for determining line widths of free-standing structures resulting from a semiconductor manufacturing process." This invention provides an apparatus and method for determining minimum line widths of free-standing structures created by a semiconductor manufacturing process. Free-standing structures are subjected to an aerosol process that is tuned and centered with respect to a critical line width. The semiconductor manufacturing process is adjusted in response to failures of free-standing structures with sub-critical line widths.
Career Highlights
Stephen K Loh has worked with prominent companies in the technology sector, including IBM and Siemens Aktiengesellschaft. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.
Collaborations
Throughout his career, Stephen has collaborated with talented individuals such as Christine Dehm and Christopher Carr Parks. These collaborations have likely enriched his work and led to further advancements in his field.
Conclusion
Stephen K Loh is a distinguished inventor whose contributions to semiconductor manufacturing have been recognized through his patents. His innovative approaches continue to influence the industry and pave the way for future advancements.