The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2006
Filed:
Nov. 05, 2004
Stephen M. Lucarini, Pleasant Valley, NY (US);
Karl W. Barth, Beacon, NY (US);
Stephen K. Loh, Fishkill, NY (US);
Stephen M. Lucarini, Pleasant Valley, NY (US);
Karl W. Barth, Beacon, NY (US);
Stephen K. Loh, Fishkill, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A apparatus and method for determining minimum line widths of free standing structures built by a semiconductor (S/C) manufacturing process. Free standing structures are created in a semiconductor device and subjected to an aerosol process which is tuned and centered with respect to a critical line width for the free standing structures. The S/C manufacturing process is tuned responsive to failure of free standing structures of sub-critical line widths.