Essex Junction, VT, United States of America

Stephen E Knight


Average Co-Inventor Count = 4.0

ph-index = 4

Forward Citations = 44(Granted Patents)


Company Filing History:


Years Active: 1996-2005

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6 patents (USPTO):Explore Patents

Title: The Innovative Mind of Stephen E. Knight

Introduction

Stephen E. Knight is a prominent inventor based in Essex Junction, VT, who has made significant contributions to the field of semiconductor technology. With a total of six patents to his name, Knight's work focuses on improving lithographic processes, which are essential for the manufacturing of semiconductor devices.

Latest Patents

Knight's latest patents include groundbreaking methodologies for contact hole profile and line edge width metrology. These patents detail a method that utilizes three-dimensional feature metrology to implement critical image control and provide feedback on lithographic focus and x/y tilt. This innovative approach allows for the measurement of three-dimensional profile changes in a photo-sensitive film and ensures stable lithographic processes by feeding back necessary exposure tool focus corrections. The method includes monitoring focus changes directly on critical product images, which enhances the capability to maintain critical dimension (CD) control during semiconductor wafer printing. Notably, Knight's technique also has diagnostic applications, allowing for the measurement of the relationship between line edge width and barometric pressure, thereby identifying potential issues in the focusing system.

Career Highlights

Stephen E. Knight is currently affiliated with International Business Machines Corporation (IBM), where he applies his expertise in semiconductor lithography. Throughout his career, Knight has developed innovative solutions that have significantly impacted the efficiency and accuracy of semiconductor manufacturing processes.

Collaborations

Knight has collaborated with several esteemed professionals, including Robert K. Leidy and Reginald R. Bowley Jr. Their collective efforts have led to advancements in metrology techniques, which are vital for maintaining quality and precision in semiconductor production.

Conclusion

Stephen E. Knight's contributions to the field of technology through his inventive methodologies highlight the importance of innovation in semiconductor manufacturing. His ongoing work at IBM continues to inspire advancements in lithographic processes, making a substantial difference in the industry. With a strong portfolio of patents, Knight stands as a remarkable inventor poised to influence the future of semiconductor technology.

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