This inventor holds 3 USPTO granted patents and 1 EPO patent. Top assignee: Tokyo Electron Limited. Active years: 2003-2005.
Company Filing History:
Years Active: 2003-2005
Title: Innovations of Stephen D Coomer
Introduction
Stephen D Coomer is a notable inventor based in Tempe, AZ (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving wafer handling systems, which are crucial for the manufacturing of semiconductor devices.
Latest Patents
Coomer's latest patents include innovative apparatus and methods for manipulating semiconductor wafers. One of his inventions details a wafer handling system that utilizes an end effector with a vacuum chuck, an internal vacuum plenum, and flow diverters. These components work together to optimize the vacuum pressure applied to unblocked vacuum ports, enhancing the attractive force on unengaged portions of the wafer. This technology is particularly beneficial for securing thin semiconductor wafers that exhibit significant warpage.
Another patent addresses a reduced edge contact wafer handling system. This system allows for the handling of wafers by contacting only a narrow area adjacent to the edge, which is especially useful for backside deposition processes. The design includes a chuck on a wafer transfer arm that holds the wafer by gravity, facilitating a seamless transfer process while minimizing damage to the wafer.
Career Highlights
Stephen D Coomer is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His expertise in wafer handling systems has positioned him as a key contributor to advancements in semiconductor technology.
Collaborations
Coomer has collaborated with notable colleagues, including Michael James Lombardi and John McIntee. Their combined efforts have led to innovative solutions in the semiconductor field.
Conclusion
Stephen D Coomer's contributions to semiconductor technology through his patents and work at Tokyo Electron Limited highlight his importance in the industry. His innovative approaches to wafer handling systems continue to influence the manufacturing processes of semiconductor devices.