Company Filing History:
Years Active: 2011-2013
Title: The Innovations of Stefan Burkart
Introduction
Stefan Burkart is a notable inventor based in Heidenheim, Germany. He has made significant contributions to the field of optical engineering, particularly in microlithographic projection exposure apparatuses. With a total of 3 patents, Burkart's work has advanced the technology used in illumination systems.
Latest Patents
One of Burkart's latest patents is an optical integrator for an illumination system of a microlithographic projection exposure apparatus. This invention relates to an optical integrator designed to produce multiple secondary light sources, enhancing the efficiency of illumination systems. Additionally, he has developed a method for manufacturing an array of elongated microlenses, which are often utilized in optical integrators or scattering plates. Another significant patent involves irradiation with high-energy ions for surface structuring and treatment of optical elements. This method allows for precise processing of surfaces using an ion beam, improving the performance of optical components.
Career Highlights
Throughout his career, Burkart has worked with prominent companies in the optical industry, including Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His experience in these organizations has contributed to his expertise in optical technologies and innovations.
Collaborations
Stefan Burkart has collaborated with several professionals in his field, including Oliver Wolf and Heiko Siekmann. These partnerships have likely fostered a creative environment that encourages innovation and the development of new technologies.
Conclusion
Stefan Burkart's contributions to optical engineering and his innovative patents demonstrate his commitment to advancing technology in the field. His work continues to influence the development of illumination systems and optical elements.