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Fremont, CA, United States of America

Sridharan Srivatsan

USPTO Granted Patents = 5

Average Co-Inventor Count = 4.6

ph-index = 2

Forward Citations = 50(Granted Patents)

Location History:

Sunnyvale, CA (US) (2002 - 2006)
Fremont, CA (US) (2008 - 2010)

Company Filing History:

Lam Research Corporation

Years Active: 2002-2010

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5 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 7690966 - Method and apparatus for detecting planarization of metal films prior to clearing (2010-04-06),

2. 7413988 - Method and apparatus for detecting planarization of metal films prior to clearing (2008-08-19),

3. 7040952 - Method for reducing or eliminating de-lamination of semiconductor wafer film layers during a chemical mechanical planarization process (2006-05-09),

4. 6896586 - Method and apparatus for heating polishing pad (2005-05-24),

5. 6475332 - Interlocking chemical mechanical polishing system (2002-11-05),

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