Fremont, CA, United States of America

Sridharan Srivatsan


Average Co-Inventor Count = 4.6

ph-index = 2

Forward Citations = 50(Granted Patents)


Location History:

  • Sunnyvale, CA (US) (2002 - 2006)
  • Fremont, CA (US) (2008 - 2010)

Company Filing History:


Years Active: 2002-2010

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5 patents (USPTO):Explore Patents

Title: The Innovations of Sridharan Srivatsan

Introduction

Sridharan Srivatsan is a notable inventor based in Fremont, CA. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work primarily focuses on methods that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of his latest patents is titled "Method and apparatus for detecting planarization of metal films prior to clearing." This innovative method provides a way to planarize a semiconductor substrate by tracking a signal that corresponds to the thickness of a conductive film on the substrate. The process involves calculating a second derivative from the tracked signal data, which helps identify the onset of planarization based on changes in the second derivative. Additionally, a CMP (Chemical Mechanical Planarization) system is included, designed to identify transitions between stages of the CMP operation.

Career Highlights

Sridharan Srivatsan is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His expertise and innovative approaches have contributed to advancements in semiconductor manufacturing technologies.

Collaborations

Throughout his career, Sridharan has collaborated with notable colleagues, including Katgenhalli Y Ramanujam and Ramesh Gopalan. These collaborations have further enriched his work and led to the development of impactful technologies in the semiconductor field.

Conclusion

Sridharan Srivatsan's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative methods continue to shape the future of semiconductor manufacturing.

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