Tokyo, Japan

Souichi Matsubara

USPTO Granted Patents = 3 

Average Co-Inventor Count = 3.3

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2022

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3 patents (USPTO):Explore Patents

Title: Souichi Matsubara: Innovator in Wafer Grinding Technology

Introduction

Souichi Matsubara is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of wafer grinding technology, holding a total of 3 patents. His innovative approaches have advanced the efficiency and precision of grinding processes in semiconductor manufacturing.

Latest Patents

Matsubara's latest patents include a grinding apparatus and a wafer grinding method. The grinding apparatus features a chuck table designed to hold a wafer, a grinding unit with a spindle for rotating a grinding wheel, and an inclination adjusting unit. This unit allows for the adjustment of the rotation axis of the chuck table in relation to the spindle. The control portion of the apparatus is capable of comparing target and present sectional shapes, enabling precise adjustments to achieve the desired wafer shape.

The wafer grinding method involves grinding the central portion of a wafer using multiple abrasive members arranged in a circular ring. This process creates a circular recess and an annular projection around it. The method also includes recognizing the height of the grinding unit post-grinding and storing this height for future reference. The upper surface of the annular projection is then ground to a predetermined height, ensuring consistency and accuracy in the final product.

Career Highlights

Throughout his career, Souichi Matsubara has worked with prominent companies such as Disco Corporation and Denso Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in wafer grinding technology.

Collaborations

Matsubara has collaborated with notable colleagues, including Tetsuo Kubo and Shinji Yamashita. These partnerships have fostered an environment of innovation and creativity, leading to the development of advanced technologies in the semiconductor industry.

Conclusion

Souichi Matsubara's contributions to wafer grinding technology exemplify his dedication to innovation and excellence. His patents and career achievements reflect a commitment to advancing the field, making him a significant figure in the industry.

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