This inventor holds 5 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2013-2016.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Nirasaki, JP (2013 - 2016)
- Amagasaki, JP (2014 - 2016)
Company Filing History:
Years Active: 2013-2016
Title: The Innovative Contributions of Songyun Kang
Introduction
Songyun Kang is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of five patents. His work focuses on improving etching methods and apparatuses, which are crucial in various manufacturing processes.
Latest Patents
Among his latest patents, Songyun Kang has developed an etching method, etching apparatus, and a ring member. This innovative etching process involves loading a substrate into a processing chamber and mounting it on a table. A ring member, made of the same material as the etching target film, surrounds the substrate. A processing gas is injected in a shower-like manner, and the etching target film is processed using plasma. This method effectively suppresses the unbalanced distribution of plasma active species near the circumferential edge of the substrate. Additionally, he has patented a plasma processing apparatus and method, which includes a first and second electrode positioned above a mounting table. This design allows for efficient plasma generation while minimizing damage to the substrate.
Career Highlights
Songyun Kang is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing plasma processing technologies, which are essential for the production of microelectronics.
Collaborations
Throughout his career, Songyun Kang has collaborated with notable colleagues, including Ikuo Sawada and Peter Ventzek. These collaborations have further enhanced his research and development efforts in the field of plasma processing.
Conclusion
Songyun Kang's innovative contributions to plasma processing technology have significantly impacted the semiconductor industry. His patents reflect a commitment to improving manufacturing processes and enhancing the efficiency of etching methods. His work continues to influence advancements in technology and manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile