Laupheim, Germany

Silke Hamm

USPTO Granted Patents = 4 

Average Co-Inventor Count = 4.5

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2024-2025

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4 patents (USPTO):Explore Patents

Title: Silke Hamm: Innovator in Workpiece Processing Technology

Introduction

Silke Hamm is a prominent inventor based in Laupheim, Germany. She has made significant contributions to the field of workpiece processing technology, holding a total of four patents. Her innovative designs focus on enhancing the efficiency and effectiveness of thermal treatment processes.

Latest Patents

One of her latest patents is a "Workpiece processing apparatus with gas showerhead assembly." This processing apparatus is designed for the thermal treatment of workpieces and includes a processing chamber, a workpiece support, a gas delivery system, and radiative heat sources for heating the workpiece. The gas delivery system features a gas showerhead assembly that is transparent to electromagnetic radiation emitted from the radiative heat sources. This assembly incorporates gas diffusion mechanisms to ensure even gas distribution within the enclosure.

Another notable patent is the "Rapid thermal processing system with cooling system." This invention provides methods for processing workpieces, particularly for performing a spike anneal rapid thermal process. The method involves controlling a heat source to heat a workpiece while monitoring its temperature relative to a setpoint. Once the workpiece reaches the desired temperature, the heat source is stopped, and a cooling system begins to flow a cooling gas to reduce the t50 peak width of the workpiece.

Career Highlights

Silke Hamm has worked with several notable companies throughout her career, including Beijing E-town Semiconductor Technology Co., Ltd and Mattson Technology, Inc. Her experience in these organizations has contributed to her expertise in workpiece processing technologies.

Collaborations

Throughout her career, Silke has collaborated with talented individuals such as Manuel Sohn and Rolf Bremensdorfer. These collaborations have further enriched her work and innovations in the field.

Conclusion

Silke Hamm is a distinguished inventor whose work in workpiece processing technology has led to significant advancements in the industry. Her patents reflect her commitment to innovation and her ability to solve complex challenges in thermal treatment processes.

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