Si Yi Li

Title: Innovations of Si Yi Li

Introduction

Si Yi Li is a notable inventor based in Fremont, CA, who has made significant contributions to the fields of mechanical engineering and semiconductor manufacturing. With a total of 6 patents to his name, his work focuses on enhancing the functionality and efficiency of various tools and processes.

Latest Patents

One of Si Yi Li's latest patents is a multiple-slope or multiple-offset tool mechanism. This invention addresses the limitations of current mechanical clickers that utilize a single-slope spring mechanism. By employing a continuously varying-slope non-linear spring or a combination of multiple-slope springs, this tool is particularly beneficial for clicker-type torque wrenches, torque screwdrivers, beam-type torque wrenches, beam-type torque screwdrivers, and shock absorbers. The design allows for operation in both clockwise and counterclockwise directions, enhancing versatility in its applications.

Another significant patent is the method of plasma etching low-k dielectric materials. This semiconductor manufacturing process allows for the plasma etching of a low-k dielectric layer with selectivity to an overlying mask layer. The etchant gas used in this process is oxygen-free and includes a fluorocarbon reactant and a nitrogen reactant. The etch rate achieved can be at least five times higher than that of traditional silicon dioxide or silicon nitride mask layers, making it particularly useful for etching structures such as damascene structures.

Career Highlights

Throughout his career, Si Yi Li has worked with prominent companies in the semiconductor industry, including Lam Research Corporation and Novellus Systems, Inc. His experience in these organizations has contributed to his expertise in developing innovative solutions for complex engineering challenges.

Collaborations

Si Yi Li has collaborated with several professionals in his field, including S M Reza Sadjadi and Helen H Zhu, who is a notable woman in the industry. These collaborations have likely enriched his work and expanded the impact of his inventions.

Conclusion

Si Yi Li's contributions to innovation in mechanical tools and semiconductor processes demonstrate his commitment to advancing technology. His patents reflect a deep understanding of engineering principles and a drive to improve existing systems.