Shyue-Sheng Lu

Title: **Innovative Contributions of Shyue-Sheng Lu in Semiconductor Technology**

Introduction

Shyue-Sheng Lu is a prominent inventor based in Hsin-Chu, Taiwan, known for his significant contributions to semiconductor technology. With two patented innovations to his name, Lu has made remarkable advancements that have the potential to enhance the efficiency and accuracy of integrated circuit fabrication. His work is rooted in the pursuit of innovation in the semiconductor industry, particularly focusing on methods that improve the precision and reliability of manufacturing processes.

Latest Patents

Lu's latest patents reflect his ingenuity in addressing the challenges faced in semiconductor device fabrication. One of his key inventions, the **Dual Damascene Process**, is a method that fabricates semiconductor devices using dual damascene techniques to create plugs in via holes. This process involves several crucial steps, including the application of a high etch rate plug material and the use of a photoresist mask for etching oxide or low k layers. The resulting inlaid metal interconnect wiring and contact vias enhance interconnect density and performance in semiconductor devices.

Additionally, he has developed a **New Method for Measuring Photoresist Dimensions** on wafer substrates during photolithography. This advanced method employs techniques such as spin-on glass and sputter oxide procedures to fix photoresist pattern profiles, ensuring accurate dimension measurements through microscopy techniques like transmission electron microscopy (TEM). This innovation is vital for preventing profile distortion and achieving precise patterning in integrated circuits.

Career Highlights

Shyue-Sheng Lu is currently affiliated with Taiwan Semiconductor Manufacturing Company Limited (TSMC), where he applies his expertise in semiconductor technology. His role entails leading various projects and collaborating with other professionals to drive innovation within the company. Lu's contributions are pivotal to TSMC's reputation as a leader in semiconductor manufacturing.

Collaborations

Throughout his career, Lu has worked alongside notable colleagues, including Hua-Tai Lin and Bang-Chien Ho. Their collective efforts underscore the importance of teamwork in fostering innovation and advancing semiconductor technologies. Together, these professionals contribute significantly to TSMC’s ongoing quest for excellence in semiconductor fabrication.

Conclusion

Shyue-Sheng Lu’s work exemplifies the critical role of inventors in the semiconductor industry. His patented processes not only advance manufacturing techniques but also contribute to the broader push for technological innovation. As the semiconductor landscape continues to evolve, Lu’s contributions will remain integral to shaping the future of electronics and integrated circuit design.