Shyh-Shin Ferng

Title: Shyh-Shin Ferng: Innovator in Semiconductor Technology

Introduction

Shyh-Shin Ferng is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on advanced manufacturing methods and innovative device structures that enhance semiconductor performance.

Latest Patents

Ferng's latest patents include groundbreaking developments in semiconductor devices and manufacturing methods. One notable patent describes a method for creating Gate-all-around (GAA) devices. This method involves forming a multi-layer structure over a substrate and creating multiple source/drain regions within this structure. The process includes patterning fins into the multi-layer structure and executing a wire release process to remove materials from one or more layers, resulting in a stack of nanostructures that connect adjacent source/drain regions of the fins.

Another significant patent involves a test key design that enables X-ray scatterometry measurement. This method includes forming a test key with a first plurality of semiconductor strips, which are then cut into an array of a second plurality of semiconductor strips. The design features isolation regions formed in recesses between the strips, with the top portions of the strips protruding to create a fin array. An X-ray beam is projected onto the test key, allowing for the collection of a diffraction pattern from the scattered X-ray beam.

Career Highlights

Throughout his career, Shyh-Shin Ferng has worked with leading companies in the semiconductor industry. He has been associated with Taiwan Semiconductor Manufacturing Company Ltd. and the Industrial Technology Research Institute. His expertise and innovative approaches have significantly impacted the development of semiconductor technologies.

Collaborations

Ferng has collaborated with notable colleagues, including Yi-Hung Lin and Chung-Li Huang. These partnerships have fostered advancements in semiconductor research and development.

Conclusion

Shyh-Shin Ferng is a key figure in semiconductor innovation, with a focus on enhancing device manufacturing and performance. His contributions through patents and collaborations continue to shape the future of semiconductor technology.