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Shunichi Mikami

USPTO Granted Patents = 5

Average Co-Inventor Count = 1.2

ph-index = 1

Forward Citations = 3(Granted Patents)

Location History:

Hsin-chu, TW (2017)
Miyagi, JP (2015 - 2019)

Company Filing History:

5 out of 10,326

Tokyo Electron Limited

Years Active: 2015-2019

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10290510 - Plasma etching method, pattern forming method and cleaning method (2019-05-14),

2. 10283368 - Plasma etching method and plasma etching apparatus (2019-05-07),

3. 10069443 - Dechuck control method and plasma processing apparatus (2018-09-04),

4. 9653321 - Plasma processing method (2017-05-16),

5. 9147556 - Plasma processing method and plasma processing apparatus (2015-09-29),

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