Company Filing History:
Years Active: 1997-2001
Title: Shun-Hsiang Chen: Innovator in Semiconductor Technology
Introduction
Shun-Hsiang Chen is a prominent inventor based in Hsin Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the efficiency and reliability of semiconductor devices.
Latest Patents
One of his latest patents is the "Insulated Wafer Pedestal." This invention provides a wafer pedestal designed to hold a semiconductor wafer, featuring a pedestal body made of a metal disc and at least three insulating spacers. These spacers support and insulate the silicon wafer, preventing concentrated electric fields that could cause arcing. The design ensures that the wafer is adequately distanced from the pedestal body, allowing for effective film depositions without adhesion issues.
Another notable patent is the "Tungsten Tunnel-Free Process." This method enhances the formation of tunnel-free tungsten plugs in semiconductor device structures. The process involves depositing an insulating layer over semiconductor structures, etching contact openings, and filling these openings with tungsten. This innovative approach results in the fabrication of integrated circuit devices with improved performance.
Career Highlights
Shun-Hsiang Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise and innovative solutions have contributed to the advancement of semiconductor technologies.
Collaborations
Throughout his career, Chen has collaborated with notable colleagues, including Hon-Shung Lui and Ming-Chih Chung. These partnerships have fostered a collaborative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Shun-Hsiang Chen's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the development of advanced semiconductor devices, showcasing the importance of innovation in technology.