Location History:
- Yamanashi, JP (2014 - 2021)
- Miyagi, JP (2015 - 2022)
Company Filing History:
Years Active: 2014-2022
Title: Inventor Shuichiro Uda: Pioneering Innovations in Etching and Plasma Treatment Technologies
Introduction
Shuichiro Uda is a renowned inventor based in Miyagi, Japan, recognized for his contributions to the fields of silicon nitride film etching and plasma treatment technologies. With a total of five patents to his name, Uda has demonstrated a commitment to enhancing manufacturing processes in the semiconductor industry.
Latest Patents
Uda's most recent patents showcase his innovative approaches to substrate treatment techniques. One of his notable patents is a method and device for etching, which involves a multi-step process. This method includes disposing a target substrate with a silicon nitride film in a processing space, introducing a gas containing hydrogen and fluorine, and selectively introducing inert gas radicals into the processing area. This invention improves the precision of silicon nitride film etching, making it more efficient.
Another significant patent is his substrate treatment method that increases the flexibility of process conditions for plasma treatment. This method tackles the challenge of preserving the electrical characteristics of silicon or metal oxide films during plasma exposure. The process involves treating the substrate with plasma generated from a halogen compound gas and subsequently heating the substrate to 450 degrees Celsius or higher in an inert gas or vacuum atmosphere. This innovative approach helps restore the characteristics of the oxide film that might be compromised after plasma treatment.
Career Highlights
Shuichiro Uda is currently associated with Tokyo Electron Limited, a prominent company that plays a vital role in the advancement of semiconductor manufacturing equipment. His work at Tokyo Electron Limited has allowed him to contribute to groundbreaking technologies that are essential for the development of electronic devices.
Collaborations
Throughout his career, Uda has collaborated with esteemed colleagues such as Shinji Fuchigami and Koji Maruyama, who share his passion for innovation in the technology sector. These collaborations have played a crucial role in the development of his patents and the advancement of semiconductor processing techniques.
Conclusion
Shuichiro Uda's inventive spirit and dedication to technological improvement have positioned him as a significant figure in the semiconductor industry. His latest patents reflect a blend of creativity and practicality, ensuring that his contributions will continue to influence the field for years to come.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.