Location History:
- Kinmen County, TW (2005)
- Kinmen, TW (2005)
- Hsinchu, TW (2006 - 2010)
Company Filing History:
Years Active: 2005-2010
Title: Innovations by Shui-Tien Lin in Semiconductor Manufacturing
Introduction
Shui-Tien Lin is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 5 patents. His work focuses on enhancing the efficiency and accuracy of semiconductor processes, which are crucial for modern electronics.
Latest Patents
One of his latest patents is titled "System and method for photolithography in semiconductor manufacturing." This invention involves a method for photolithography that includes defining a test critical dimension target for a photolithography mask, measuring the mask's critical dimension, and determining any deviations. The method further optimizes the photolithography light base energy based on these deviations to ensure precise wafer exposure.
Another notable patent is "Methods and systems of offline measurement for process tool monitoring." This invention provides a method for offline measurement applied to semiconductor processes. It includes a self-tuning monitor rule database that stores predefined monitor rules for lot processing. The method allows for the monitoring of process tools and the identification of abnormal states, ensuring that lot processing is either continued or terminated based on the results.
Career Highlights
Shui-Tien Lin is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His role involves developing innovative solutions that enhance manufacturing processes and improve product quality.
Collaborations
He has collaborated with notable colleagues such as Yi-Chuan Lo and Hui-Chen Chu, contributing to various projects that advance semiconductor technology.
Conclusion
Shui-Tien Lin's contributions to semiconductor manufacturing through his innovative patents demonstrate his expertise and commitment to advancing technology in this critical field. His work continues to influence the industry and pave the way for future innovations.