The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Mar. 03, 2004
Chih-wei Hsu, Chuang-Hua, TW;
Span LU, Hsin-Chu, TW;
Kuang-huan Hsu, Dalin Township, Chiayi County, TW;
Chen-yung Lin, Dayuan Township, Taoyuan County, TW;
Shui-tien Lin, Hsinchu, TW;
Chun-hung Lin, Hsinchu, TW;
Chih-Wei Hsu, Chuang-Hua, TW;
Span Lu, Hsin-Chu, TW;
Kuang-Huan Hsu, Dalin Township, Chiayi County, TW;
Chen-Yung Lin, Dayuan Township, Taoyuan County, TW;
Shui-Tien Lin, Hsinchu, TW;
Chun-Hung Lin, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
Provided are a system and method for preventing contamination in a semiconductor manufacturing environment. The method includes comparing one or more attributes associated with a product, such as a substrate, with one or more attributes associated with an operation. If the comparison indicates that the product is not compatible with the operation, then the operation is suspended with respect to the product. If the comparison indicates that the product is compatible with the operation, then the operation is performed on the product.