Location History:
- Rolla, MO (US) (2003 - 2006)
- Ballwin, MO (US) (2009 - 2010)
Company Filing History:
Years Active: 2003-2010
Title: Shreeram V Deshpande: Innovator in Anti-Reflective Coatings
Introduction
Shreeram V Deshpande is a notable inventor based in Rolla, MO (US). He has made significant contributions to the field of advanced microlithography through his innovative patents. With a total of 7 patents, Deshpande has focused on developing new materials and compositions that enhance the performance of anti-reflective coatings.
Latest Patents
One of his latest patents involves organic anti-reflective coating compositions for advanced microlithography. This invention introduces new polymers and anti-reflective compositions that include a polymer, such as epoxy cresol novolac resins, bonded with a chromophore like 4-hydroxybenzoic acid and trimellitic anhydride. These compositions can be applied to substrates, such as silicon wafers, to create anti-reflective coating layers that exhibit high etch rates, minimizing or preventing reflection during photoresist exposure and development.
Another significant patent by Deshpande focuses on anti-reflective coatings and dual damascene fill compositions that comprise styrene-allyl alcohol copolymers. This invention provides new anti-reflective or fill compositions with improved flow properties. The compositions include a styrene-allyl alcohol polymer and at least one additional polymer, such as cellulosic polymers. These innovative compositions protect contact or via holes from degradation during subsequent etching in the dual damascene process and can also be applied to substrates to form effective anti-reflective coating layers.
Career Highlights
Shreeram V Deshpande is currently associated with Brewer Science, Inc., where he continues to push the boundaries of innovation in his field. His work has been instrumental in advancing technologies that are critical for the semiconductor industry.
Collaborations
Deshpande has collaborated with notable colleagues, including Mandar R Bhave and Kelly A Nowak, contributing to a dynamic research environment that fosters innovation.
Conclusion
Shreeram V Deshpande's contributions to the field of anti-reflective coatings and microlithography are noteworthy. His innovative patents and ongoing work at Brewer Science, Inc. highlight his commitment to advancing technology in the semiconductor industry.