Tama, Japan

Shinya Yoshimoto


Average Co-Inventor Count = 3.5

ph-index = 1

Forward Citations = 4(Granted Patents)


Company Filing History:


Years Active: 2022-2025

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4 patents (USPTO):

Title: Shinya Yoshimoto: Innovating the Future of Electronic Structure Formation

Introduction

Shinya Yoshimoto, an inventive mind hailing from Tama, Japan, has made significant contributions to the field of materials science with a focus on electronic structures. With a total of three patents to his name, Yoshimoto's work embodies cutting-edge methodologies that have implications for future technologies.

Latest Patents

Among his latest inventions are methods and apparatuses for flowable gap-fill. These innovations describe cyclical processes for gap-fill wherein deposition is followed by thermal annealing. In some embodiments, this process is conducted in separate stations, with the second module heated to a higher temperature than the first, optimizing the flowable deposition of thin films. Additionally, Yoshimoto has developed methods for forming electronic structures using reforming gas. This involves creating activated species via microwave radiation which interact with substrates in a low-pressure environment, helping reform silicon nitride films and enhancing their properties.

Career Highlights

Yoshimoto is currently affiliated with ASM IP Holding B.V., a company recognized for its advancements in materials and processes for the semiconductor industry. His expertise and innovative approaches play a critical role in the company's research and development endeavors.

Collaborations

Throughout his career, Yoshimoto has collaborated with notable colleagues including Jun Yoshikawa and Toshihisa Nozawa. These partnerships highlight the collaborative spirit inherent in scientific innovation, bringing together diverse skills and insights to push the boundaries of technology.

Conclusion

Shinya Yoshimoto stands as a remarkable figure in the realm of electronic structure innovations. With his groundbreaking patents and collaborative efforts, he continues to contribute to advancements that may redefine future electronic applications. His work not only showcases personal achievement but also reflects the importance of teamwork and innovation in driving progress in technology.

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