The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Oct. 18, 2021
Asm Ip Holding B.v., Almere, NL;
Shinya Yoshimoto, Tama, JP;
Takahiro Onuma, Chofu, JP;
Makoto Igarashi, Fuchu, JP;
Yukihiro Mori, Machida, JP;
Hideaki Fukuda, Hachioji, JP;
Rene Henricus Jozef Vervuurt, Heverlee, BE;
Timothee Blanquart, Oud-Heverlee, BE;
ASM IP Holding B.V., Almere, NL;
Abstract
In accordance with some embodiments herein, methods and apparatuses for flowable deposition of thin films are described. Some embodiments herein relate to cyclical processes for gap-fill in which deposition is followed by a thermal anneal and repeated. In some embodiments, the deposition and thermal anneal are carried out in separate station. In some embodiments second module is heated to a higher temperature than the first station. In some embodiments, the thermal anneal comprises RTA.