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Yamanashi, Japan

Shinya Shima

USPTO Granted Patents = 5

Average Co-Inventor Count = 9.0

ph-index = 4

Forward Citations = 74(Granted Patents)

Location History:

Nirasaki, JP (2011 - 2013)
Yamanashi, JP (2014 - 2017)

Company Filing History:

5 out of 10,326

Tokyo Electron Limited

Years Active: 2011-2017

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9728381 - Plasma processor and plasma processing method (2017-08-08),

2. 9437402 - Plasma processor and plasma processing method (2016-09-06),

3. 8904957 - Plasma processor and plasma processing method (2014-12-09),

4. 8387562 - Plasma processor and plasma processing method (2013-03-05),

5. 8056503 - Plasma procesor and plasma processing method (2011-11-15),

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