Company Filing History:

5 out of 10,295

Tokyo Electron Limited

patents

Years Active: 2014-2021

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10974181 - Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method (2021-04-13),

2. 10493387 - Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method (2019-12-03),

3. 10000331 - Bottle change apparatus, substrate treatment apparatus, bottle change method, bottle cap, bottle cap change apparatus and bottle cap change method (2018-06-19),

4. 9229337 - Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage medium (2016-01-05),

5. 8873849 - Image processing method, image display method, image processing apparatus and a non-transitory computer-readable recording medium (2014-10-28),

Title: Shinobu Miyazaki: Innovator in Filter Technology

Introduction

Shinobu Miyazaki is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of filter technology, holding a total of 5 patents. His innovative approaches have led to advancements in treatment liquid supply systems.

Latest Patents

Miyazaki's latest patents include the following: a filter unit pretreatment method, a treatment liquid supply apparatus, a filter unit heating apparatus, and a treatment liquid supply passage pretreatment method. In one embodiment of his filter unit pretreatment method, after a new filter unit is installed in a treatment liquid supply apparatus, a step of soaking the filter unit with a solvent for pretreatment is performed before a solvent-containing treatment liquid is passed through the filter unit. The solubility of the material constituting the filter part of the filter unit to the solvent is greater than its solubility to the treatment liquid. This innovative step allows for the removal of components that may elute from the filter part into the treatment liquid, thereby preventing the production of foreign matters or particles before the treatment liquid is passed through the filter unit.

Career Highlights

Shinobu Miyazaki is currently associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work has been instrumental in enhancing the efficiency and reliability of filter systems used in various applications.

Collaborations

Miyazaki has collaborated with notable colleagues, including Arnaud Alain Jean Dauendorffer and Shuji Iwanaga. These collaborations have further enriched his work and contributed to the development of innovative solutions in filter technology.

Conclusion

Shinobu Miyazaki's contributions to filter technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in treatment liquid supply systems, showcasing the importance of innovation in engineering.

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