The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Jun. 15, 2012
Applicants:
Shuji Iwanaga, Koshi, JP;
Shinobu Miyazaki, Koshi, JP;
Inventors:
Shuji Iwanaga, Koshi, JP;
Shinobu Miyazaki, Koshi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G01N 21/95 (2006.01); G06T 5/00 (2006.01);
U.S. Cl.
CPC ...
G06T 5/009 (2013.01); G01N 21/9501 (2013.01); G06T 2207/30148 (2013.01);
Abstract
An image processing method of picking up an image of a substrate and converting pixel values of the picked-up substrate image makes the pixel values of the picked-up substrate image into a histogram, and creates a tone curve T composed of a periodic function of a predetermined amplitude and a predetermined period based on a distribution of the pixel values in the histogram. The pixel values of the picked-up substrate image are converted using the tone curve T to obtain a substrate image with a high contrast.