The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Sep. 26, 2014
Tokyo Electron Limited, Tokyo, JP;
Yuichi Yoshida, Koshi, JP;
Ryouichirou Naitou, Koshi, JP;
Arnaud Alain Jean Dauendorffer, Koshi, JP;
Koji Takayanagi, Koshi, JP;
Shinobu Miyazaki, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
In one embodiment, after a new filter unit () is installed in a treatment liquid supply apparatus, there is performed, before a solvent-containing treatment liquid is passed through the filter unit, a step of soaking the filter unit with a solvent for pretreatment and then discharging therefrom the solvent. The solubility of a material, constituting a filter part () of the filter unit, to the solvent is greater than the solubility of the material to the treatment liquid. This step makes it possible to remove a component, which may elute from the filter part into the treatment liquid to produce foreign matters (particles), before treatment liquid is passed through the filter unit.