Hsinchu, Taiwan

Shinn-Sheng Yu

This inventor holds 129 USPTO granted patents and 10 published patent applications, primarily in EUV Lithography (CPC class G03F1-24). Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 1999-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Shinn-Sheng Yu. Retrieved from https://idiyas.com/inventor/shinn-sheng-yu

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 129 

% Patents Active = 55.8

Average Co-Inventor Count = 3.7

ph-index = 20

Forward Citations = 3,461(Granted Patents)

Forward Citations (Not Self Cited) = 3,217(Dec 10, 2025)


Inventors with similar research interests:

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Location History:

  • Chang-Hua, TW (1999)
  • Taichung, TW (2001 - 2007)
  • Hsin-Chu, TW (2009 - 2024)

Company Filing History:


Years Active: 1999-2026

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Areas of Expertise:
EUV Lithography
Semiconductor Manufacturing
Mask Defect Mitigation
Photolithography
Geometric Mask Rule
Pellicle Fabrication
Optical System
Integrated Circuit Patterning
Asymmetric Pupil Configuration
Defect Printability
3D Mask Structure
Focus Monitoring
129 patents (USPTO):Explore Patents

Title: Shinn-Sheng Yu: An Innovator in Semiconductor Technology

Introduction:

Throughout his career, Shinn-Sheng Yu has been recognized for his innovative work in the field of semiconductor technology. Holding key positions in leading technology companies, he has played a pivotal role in driving research and development efforts. This article will delve into his latest patents, career highlights, and collaborations that have shaped his journey as an esteemed innovator.

Latest Patents:

Shinn-Sheng Yu's latest patents showcase his expertise in semiconductor technology. One notable patent is the "Geometric Mask Rule Check with Favorable and Unfavorable Zones." This method involves generating a diffraction map from target patterns, identifying favorable and unfavorable zones, and modifying sub-resolution patterns to ensure they are positioned away from the unfavorable zone. This innovation has significant implications for improving accuracy and efficiency in semiconductor manufacturing processes.

Another patent of note is the "Method of Manufacturing a Semiconductor Device and Apparatus for Manufacturing the Semiconductor Device." This method involves a step-by-step process of dividing dies along the x and y axes, forming specific sequences, and performing exposure and stepping operations accordingly. By following these systematic steps, this innovation enables higher precision and productivity in semiconductor device manufacturing.

Career Highlights:

Shinn-Sheng Yu's impressive career spans across leading technology companies, with his current position being at Taiwan Semiconductor Manufacturing Company Limited (TSMC). TSMC, a global leader in semiconductor manufacturing, benefits greatly from his expertise and contributions to research and development efforts.

Throughout his career, Yu has significantly advanced semiconductor technology and has contributed to numerous milestones in the field. His precise understanding of semiconductor manufacturing processes has led to the successful development of cutting-edge technologies, improving efficiency and performance in various industries.

Collaborations:

Shinn-Sheng Yu has collaborated with esteemed professionals in his field, including Anthony Yen and Jeng-Horng Chen. These collaborations have allowed for the exchange of ideas, further pushing the boundaries of innovation in semiconductor technology. By working hand in hand with these individuals, Yu has successfully realized breakthroughs and advancements that have benefited both the industry and society as a whole.

Conclusion:

Shinn-Sheng Yu's contributions to the field of semiconductor technology are truly remarkable. Through his expertise and innovative mindset, he has paved the way for advancements in manufacturing processes, specifically in the semiconductor industry. Yu's latest patents exemplify his commitment to enhancing accuracy, efficiency, and precision. His collaborations with esteemed professionals further emphasize the collaborative and progressive nature of innovation. As an industry leader, Shinn-Sheng Yu continues to leave a lasting impact on the world of semiconductor technology.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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