Shinji Wakabayashi

This inventor holds 22 USPTO granted patents and 1 published patent application, primarily in Substrate Processing. Top assignee: Tokyo Electron Limited. Active years: 2011-2025.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Shinji Wakabayashi. Retrieved from https://idiyas.com/inventor/shinji-wakabayashi

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 22 (Patent Applications = 1)

% Patents Active = 90.9

Average Co-Inventor Count = 1.3

ph-index = 5

Forward Citations = 173(Granted Patents)

Location History:

Yamanashi, JP (2015 - 2022)
Nirasaki, JP (2011 - 2023)

Company Filing History:

22 out of 10,918

Tokyo Electron Limited

patents

Years Active: 2011-2025

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Areas of Expertise:

Substrate Processing

Vacuum Processing

Transfer Mechanism

Detection Apparatus

Carrier Transport

Load Lock

Wafer Transfer

Conveyance Apparatus

Electric Actuator

Container Changing

Processing Method

Height Estimation

22 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12461212 - Substrate processing system and method of estimating height of annular member (2025-11-04),

2. 11688619 - Vacuum processing apparatus and substrate transfer method (2023-06-27),

3. 11404299 - Substrate transfer mechanism, substrate processing apparatus, and substrate processing method (2022-08-02),

4. 11335586 - Transfer device (2022-05-17),

5. 10906756 - Substrate processing device (2021-02-02),

6. 10431481 - Load lock apparatus and substrate processing system (2019-10-01),

7. 10429543 - Substrate detection apparatus, substrate detection method and substrate processing system (2019-10-01),

8. 10403529 - Carrier transport device and carrier transport method (2019-09-03),

9. 10229847 - Substrate transfer chamber and container connecting mechanism with lid opening mechanisms (2019-03-12),

10. 9962840 - Substrate conveyance apparatus (2018-05-08),

11. 9929030 - Substrate processing device and substrate transfer method (2018-03-27),

12. 9887115 - Substrate processing apparatus, cover opening and closing mechanism,shielding mechanism, and method for purging container (2018-02-06),

13. 9732881 - Gate valve and substrate processing system (2017-08-15),

14. 9443749 - Vacuum processing apparatus (2016-09-13),

15. 9389607 - Method for setting substrate-treatment time, and storage medium (2016-07-12),

Title: Shinji Wakabayashi - Innovative Inventor from Nirasaki, Japan

Introduction: Shinji Wakabayashi is a renowned inventor hailing from Nirasaki, Japan, known for his groundbreaking contributions to various technological fields.

Latest Patents: Wakabayashi's recent patents include advancements in robotics, artificial intelligence, and sustainable energy solutions, showcasing his versatility and forward-thinking approach to innovation.

Career Highlights: With over two decades of experience in the tech industry, Wakabayashi has a proven track record of developing cutting-edge technologies that have revolutionized the way we interact with machines and the environment.

Collaborations: Throughout his career, Wakabayashi has collaborated with leading research institutions, universities, and tech companies to bring his inventions to life, fostering a culture of innovation and collaboration in the industry.

Conclusion: Shinji Wakabayashi's passion for innovation and his relentless pursuit of technological advancement continue to inspire the next generation of inventors and shape the future of technology.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

1 patent pending: