Tokyo, Japan

Shingo Togashi

USPTO Granted Patents = 44 

 

Average Co-Inventor Count = 5.3

ph-index = 11

Forward Citations = 1,510(Granted Patents)


Location History:

  • Ohta-ku, JP (2011)
  • Tokyo, JP (2014 - 2024)

Company Filing History:


Years Active: 2011-2025

where 'Filed Patents' based on already Granted Patents

44 patents (USPTO):

Title: Shingo Togashi: An Innovator in Polishing Technology

Introduction

Shingo Togashi, based in Tokyo, Japan, is a prominent inventor with an impressive portfolio of 43 patents. His work primarily focuses on innovations in polishing technology, demonstrating his expertise in film-thickness measurement and substrate polishing methods.

Latest Patents

Among Shingo Togashi's latest contributions to the field, three notable patents stand out: a film-thickness measuring method, a method for detecting notch portions, and a polishing apparatus. The film-thickness measuring method employs a specialized device, part of which is mounted on a polishing table, to accurately assess the thickness of the substrate while it is being polished. This method enhances the precision of polishing operations by allowing for real-time control of the polishing end point.

The polishing apparatus described in his recent patents features a substrate holder equipped with a retaining ring, which acts independently of the substrate holding surface. This design allows for enhanced control during the polishing process, ensuring that the substrate is polished uniformly and efficiently, thanks to the unique rotating mechanism and local load exerting solutions integrated within the apparatus.

Career Highlights

Shingo Togashi's distinguished career includes significant advancements in the fields of materials science and engineering. His role at Ebara Corporation has been pivotal in driving innovation within the polishing technology sector. Over the years, Togashi's dedication to research and development has earned him recognition as a leading inventor among his peers.

Collaborations

Throughout his career, Shingo Togashi has collaborated with notable coworkers such as Makoto Fukushima and Osamu Nabeya. Together, they have contributed to groundbreaking research and developments in the field, demonstrating the importance of teamwork and collaboration in driving technological advancements.

Conclusion

In summary, Shingo Togashi's innovative spirit and commitment to advancing polishing technology have made him a key figure in his field. With 43 patents to his name, his work continues to influence the industry, enhancing the quality and efficiency of substrate polishing processes. His collaborations with skilled professionals further highlight the significant impact of teamwork in fostering innovation within the technology landscape.

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