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For the Inventor, By the Inventor

Palo Alto, CA, United States of America

Shih-Yuan Cheng

USPTO Granted Patents = 4

Average Co-Inventor Count = 3.7

ph-index = 3

Forward Citations = 18(Granted Patents)


Location History:

  • Foster City, CA (US) (2005)
  • Palo Alto, CA (US) (2014 - 2016)

Company Filing History:

goldMedal4 out of 3,768 
 
Lam Research Corporation
 patents

Years Active: 2005-2016

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4 patents (USPTO):
1. 9466502 - Line width roughness improvement with noble gas plasma (2016-10-11),
2. 9263284 - Line width roughness improvement with noble gas plasma (2016-02-16),
3. 8753804 - Line width roughness improvement with noble gas plasma (2014-06-17),
4. 6977184 - Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring (2005-12-20),
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