Location History:
- Kanagawaken-ken, JP (1997)
- Fuchu, JP (1991 - 1998)
- Kawasaki, JP (1996 - 2000)
- Kanagawa-ken, JP (2000 - 2001)
- Tokyo, JP (1993 - 2010)
Company Filing History:
20 out of 256 
4 out of 355 
1 out of 4 Years Active: 1991-2010
Title: Innovations of Shigeru Mizuno: Pioneering Electrostatic Chuck Devices
Introduction
Shigeru Mizuno, a prolific inventor based in Kawasaki, Japan, has made significant contributions to the field of technology with a remarkable portfolio of 25 patents. His innovations focus primarily on electrostatic chuck devices, which are essential in various substrate processing applications. His work has not only advanced technology but also improved manufacturing efficiency and product quality.
Latest Patents
One of his latest patents involves an advanced electrostatic chuck device designed to enhance the performance of substrate processing. This device features a dielectric plate with an embossed surface containing multiple projections, along with an electrode and an external power source. The innovative design ensures that the substrate support surfaces of the projections are interconnected through conductor wiring. During processing, the embossed projections establish contact with the back of the substrate, allowing the back and the conductor wiring to share the same electric potential through charge migration. This innovation minimizes force generation between the substrate and the conductor wiring, preventing friction and ensuring a smooth operation. As a result, Shigeru’s electrostatic chuck device reduces particle generation, facilitates stable substrate removal and conveyance, and significantly boosts yield and system operating rates.
Career Highlights
Shigeru Mizuno has honed his expertise at renowned companies such as Anelva Corporation and Canon Anelva Corporation. His tenure at these organizations allowed him to develop cutting-edge technologies that have had a lasting impact on the industry.
Collaborations
Throughout his career, Shigeru has worked alongside talented professionals, including Nobuyuki Takahashi and Masahito Ishihara. Their collaborative efforts have undoubtedly contributed to the innovative advancements in electrostatic chuck devices and broader technological fields.
Conclusion
Shigeru Mizuno’s work exemplifies the spirit of innovation and dedication to advancing technology in substrate processing. With 25 patents and numerous pioneering ideas, his contributions continue to shape the landscape of electrostatic devices, ensuring improved efficiency and quality in manufacturing processes. As he continues to innovate, the future holds even more promise for advancements in this critical area of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.