Location History:
- Oshu, JP (2015)
- Iwate, JP (2014 - 2018)
Company Filing History:
Years Active: 2014-2018
Title: Shigehiro Ushikubo: Innovator in Film Deposition Technology
Introduction
Shigehiro Ushikubo, based in Iwate, Japan, is a notable inventor with a remarkable portfolio of five patents. His innovations primarily revolve around advanced film deposition technologies, aimed at enhancing the precision and efficiency of semiconductor manufacturing processes.
Latest Patents
Ushikubo's latest patents include a film deposition apparatus, film deposition method, and a computer-readable recording medium. One of his inventions details a film deposition apparatus equipped with a vacuum chamber where two gases are supplied sequentially multiple times. The apparatus features a rotation table that controls the supply of gas through specialized parts while generating plasma through inductive coupling by an antenna. This ingenious setup allows for intricate plasma processes necessary for film deposition. Another notable patent describes a similar film deposition apparatus, also utilizing a turntable and plasma gas supplying components designed to optimize the deposition process while preventing electric field interference.
Career Highlights
Ushikubo is affiliated with Tokyo Electron Limited, a prominent player in the semiconductor manufacturing equipment industry. His contributions significantly enhance the operational capabilities of semiconductor fabrication, ensuring higher quality output for various applications.
Collaborations
Throughout his career, Ushikubo has collaborated with accomplished professionals like Hitoshi Kato and Hiroyuki Kikuchi. Together, they have advanced research and development projects that have pushed the boundaries of existing technologies in the semiconductor space.
Conclusion
Shigehiro Ushikubo's innovations and inventions are a testament to his commitment to advancing semiconductor manufacturing technology. Through his work at Tokyo Electron Limited and collaboration with esteemed colleagues, he has established himself as a key figure in the field of film deposition technology. His patents continue to influence and shape the future of semiconductor production processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.